Bubbling sheet

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Bubbling sheet

Bubbling sheet

It is a bubble generating unit made of fluoroplastic PTFE.
By passing air through the Porous PTFE sheet, bubbles can be formed.


●Cleaning of wafer in the semiconductor manufacturing process
●Absorption reaction process of carbon dioxide/chlorine gas
●Stirring chemicals

Maximum operating temperature


Downloading the chemical resistance table

The chemical resistance table (PDF)


●Excellent chemical resistance
●No concern of contamination due to the elution.
●Stirring of chemicals and cleaning can be effectively performed by generating the fine bubbles.
●Made to order. Please contact us for details.

Product specifications

Maximum thickness (mm) Maximum width (mm) Maximum length(mm)
20 180 380

Product performance

Bubble diameter (µm) Bubbling rate (%) Tensile strength (MPa) Stretch (%) Hardness (HDD) Surface roughness (Rmax)
2 34 6.0 40 46 27

*The characteristic values given in the table are the measured values, and not the standards.


Cleansing jig

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